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ALD regarding ZnO was carried out utilizing a Beneq technique (TFS Two hundred) from 200��C making use of diethylzinc #links# (Zn(C2H5)Two, DEZ) as well as drinking water because zinc oxide along with fresh air resource, respectively. Large chastity N2 had been the method petrol within our test. During the deposition, the response slot provided was preserved at A single.0?mbar with a regular N2 h

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